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Title:
WAFER PROBER AND CERAMIC BOARD USED FOR THE SAME
Document Type and Number:
Japanese Patent JP2001196424
Kind Code:
A
Abstract:

To provide a ceramic board which is turned black enough to cover a guard electrode and a ground electrode and high enough in thermal conductivity and volume resistivity to function as a wafer prober.

A ceramic board is provided with a chuck top conductor layer on its surface. In the X-ray diffraction chart of the ceramic board, other than a peak of ceramic which forms a main crystal phase, a peak of carbon is detected at an X-ray diffraction angle 2θ of 44 to 45°.


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Inventors:
ITO ATSUSHI
HIRAMATSU YASUJI
ITO YASUTAKA
Application Number:
JP2000313460A
Publication Date:
July 19, 2001
Filing Date:
October 13, 2000
Export Citation:
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Assignee:
IBIDEN CO LTD
International Classes:
C04B35/581; C04B41/88; G01R1/06; G01R31/28; H01L21/66; G01R31/26; (IPC1-7): H01L21/66; C04B35/581; C04B41/88; G01R1/06; G01R31/26; G01R31/28
Attorney, Agent or Firm:
Yasuo Yasutomi (2 outside)



 
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