Title:
TEST DEVICE AND SOCKET BOARD
Document Type and Number:
WIPO Patent Application WO/2010/001440
Kind Code:
A1
Abstract:
A test device (100) tests N (N is an integer of 2 or more) DUTs (110), each of which is provided with one or more input/output terminals (P1). A driver (20) is provided in common to the input/output terminals (P1) of the N DUTs (110). A terminating circuit (22) is provided in common to the input/output terminals (P1) of the N DUTs (110). A first wiring (L1) connects the output terminal of the driver (20) with a first node (N1). A second wiring (L2) connects the terminating circuit (22) with a second node (N2). N third wirings (L3) connect the first node with the input/output terminals (P1) of the respective N DUTs (110). N fourth wirings (L4) connect the second node (N2) with the input/output terminals (P1) of the respective N DUTs (110). The first wiring (L1) and the second wiring (L2) have a characteristic impedance (ZO) of a predetermined value, and the N third wirings (L3) and the N fourth wirings (L4) have a characteristic impedance of N-times the predetermined value.
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Inventors:
SEKI NOBUSUKE (JP)
Application Number:
PCT/JP2008/001772
Publication Date:
January 07, 2010
Filing Date:
July 03, 2008
Export Citation:
Assignee:
ADVANTEST CORP (JP)
SEKI NOBUSUKE (JP)
SEKI NOBUSUKE (JP)
International Classes:
G01R31/26; H01L21/66
Domestic Patent References:
| WO2005088324A1 | 2005-09-22 | |||
| WO2007018020A1 | 2007-02-15 |
Foreign References:
| JP2000292491A | 2000-10-20 | |||
| JP2005292116A | 2005-10-20 | |||
| JP2002131388A | 2002-05-09 |
Attorney, Agent or Firm:
MORISHITA, SAKAKI (JP)
Sakaki Morishita (JP)
Sakaki Morishita (JP)
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